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飞秒激光直写技术(FsLDW)因其优异的三维加工能力、高空间分辨率、低附加损伤等优点被广泛地应用于微纳加工领域,但传统飞秒激光直写技术在加工效率、加工面积和加工精度之间存在矛盾。为了实现高速、大面积、高精度的激光微纳加工,构建了一种由大范围水平位移台和高速旋转台组成的极坐标系飞秒激光直写系统。基于该系统,研究了轴对称样品中心对准方法及曲面曲率校准方法,并在曲面上制备了多阶三维结构。最终完成了在透镜曲面上制备直径为10mm的衍射圆光栅结构,实现了飞秒激光高速、大尺寸、高精度地制备大面积三维结构。该研究为高性能折衍混合光学元件的制备提供了有力的技术支持。
Femtosecond Laser Direct Writing (FsLDW) has been widely used in the field of micro / nano processing because of its excellent three-dimensional processing ability, high spatial resolution and low additional damage. However, the traditional femtosecond laser direct writing technology has advantages in processing efficiency, processing There is a conflict between area and machining accuracy. In order to achieve high-speed, large-area and high-precision laser micro-nano machining, a polar coordinate system femtosecond laser direct writing system composed of a large-scale horizontal stage and a high-speed rotary table is constructed. Based on this system, the method of centering axisymmetric samples and the method of surface curvature calibration are studied, and a multi-level three-dimensional structure is prepared on the surface. Finally, a diffraction circular grating structure with a diameter of 10 mm was fabricated on the lens surface, and a large-area three-dimensional structure was fabricated with high speed, large size and high precision of femtosecond laser. The research provides a powerful technical support for the preparation of high performance composite optical elements.