热处理对溶胶-凝胶TiO2薄膜的特性影响

来源 :同济大学学报 | 被引量 : 0次 | 上传用户：godzerovwx

【摘要】

：

研究了热处理对溶胶-凝胶法制备的TiO2薄膜材料的晶体结构、致密化以及光学特性的影响结果表明TiO2溶胶颗粒的最低结晶化温度为400℃,晶体尺寸随着热处理温度的升高而增大;Ti

【作者】

：

吴广明

【机构】

：

同济大学波耳固体物理研究所,

【出处】

：

同济大学学报

【发表日期】

：

2004年期

【关键词】

：

溶胶-凝胶法 TiO2薄膜密度

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研究了热处理对溶胶-凝胶法制备的TiO2薄膜材料的晶体结构、致密化以及光学特性的影响结果表明TiO2溶胶颗粒的最低结晶化温度为400℃,晶体尺寸随着热处理温度的升高而增大;TiO2薄膜的厚度随着热处理温度的升高从120nm减小到47nm,相应的折射率则从1.85增加到2 3;同时,TiO2薄膜的孔洞率随着热处理温度的升高从0.23降低到0.122,密度则从2.83 g.cm-3增加到3.73 g.cm-3

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热处理对溶胶-凝胶TiO2薄膜的特性影响

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