Ｑ表石英摆片加工工艺本工艺包括用超声波机床将石英玻璃落料成形，经研磨和镜面抛光制出基片，再经化学腐蚀加工出柔性梁、ＣＯ２激光加工中心孔和修梁、基片真空镀制ＡｕＣｒ电极，最后光纤分档测试装表。本工艺难度大，乃多项高新技术与工艺技术的复合。其中超声波整体... Q Table quartz pendulum processing technology The process includes the use of ultrasonic machine cut quartz glass, after grinding and mirror polishing the substrate, and then processed by chemical etching of flexible beams, CO2 laser processing center hole and repair beam, the substrate Vacuum plating AuCr electrode, the final optical fiber sub-test equipment table. The process is difficult, but a number of high-tech and technology compound. One of the whole ultrasound ...