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对用硅烷－氢（ＳｉＨ４／Ｈ２）混合气体在Ｃｕ表面进行化学热处理获得的含硅涂层进行了抗氧化性研究．结果表明，纯铜表面含硅涂层的形成提高了材料的抗氧化性能．对含硅铜涂层的氧化机理进行了探讨．
The oxidation resistance of silicon-containing coatings obtained by chemical heat treatment on the surface of Cu with silane-hydrogen (SiH4 / H2) mixed gas was studied. The results show that the formation of silicon-containing coating on pure copper improves the oxidation resistance of the material. The oxidation mechanism of silicon-containing copper coatings was discussed.