集成电路要上去依靠什么?依靠工艺、专用设备和基础材料。特别是专用设备,在集成电路的开发和生产中占有重要的地位。从六十年代以来,专用设备逐代演变,大规模集成电路才能从实验室的珍品转变为当今的年产量几十亿块的大工业产品。在西方国家,即使经济处于萧条时期,也从未放松过对专用设备的高额投资。为什么?为了让集成电路专用设备迅速 What to rely on integrated circuits rely on? Rely on technology, special equipment and basic materials. In particular, special equipment, in the development and production of integrated circuits occupy an important position. Since the 1960s, specialized equipment has evolved from generation to generation so that large-scale integrated circuits can be transformed from laboratory treasures into today's large-scale industrial products with billions of annual output. In western countries, the high investment in special equipment has never been relaxed even when the economy is in a depression. Why? To make IC-specific devices fast