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描述了用高功率脉冲激光打靶产生的等离子体作为软Ｘ射线源而进行的接近式软Ｘ射线光刻研究。采用正性光刻胶ＰＭＭＡ．得到了一些新的研究结果．
Describes a close-in soft X-ray lithography study of plasmas generated by high power pulsed laser shots as soft X-ray sources. Positive photoresist PMMA is used. Got some new research results.