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以纯甲烷为反应气体,采用等离子增强化学气相沉积技术通过改变沉积气压在316L不锈钢表面制备了一系列的类金刚石薄膜。薄膜结构、机械性能和摩擦学性能分别通过拉曼光谱仪(Raman)、纳米压痕仪(Nano-indententorⅡ)和往复球盘摩擦磨损试验仪获得。研究结果表明,随着沉积气压从7 Pa增加到15 Pa,薄膜的sp3含量和机械性能明显增加,而摩擦学性能显著降低。随着沉积气压从15 Pa增加到31 Pa,薄膜的sp3含量和机械性能明显降低,而摩擦学性能却显著增加。
Using pure methane as reaction gas, a series of diamond-like carbon films were prepared on the surface of 316L stainless steel by changing deposition pressure by plasma enhanced chemical vapor deposition. The film structure, mechanical properties and tribological properties were obtained by Raman, Nano-indententor II and reciprocating ball disc friction and wear tester respectively. The results show that with the increase of deposition pressure from 7 Pa to 15 Pa, the sp3 content and the mechanical properties of the films increase obviously, while the tribological properties decrease remarkably. As the deposition pressure increased from 15 Pa to 31 Pa, the sp3 content and mechanical properties of the films decreased obviously, but the tribological properties of the films were significantly increased.