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采用信息熵作为去除函数驻留点随机分布的测度,基于熵增理论设计了局部随机加工路径,有效抑制磁流变抛光的中高频误差.在自研的KDMRF-1000F磁流变抛光机床上进行实验研究,局部随机路径加工区域的中高频误差明显小于光栅扫描路径加工区域.直径为98mm的平面镜,一次迭代修形(7.46min),面形误差峰谷值提高到0.062λ(λ=632.8nm),均方根误差提高到0.010λ,且未见明显的尖峰状中高频误差.实验结果表明,基于熵增原理设计的局部随机路径能有效地抑制磁流变加工的中高频误差.
The information entropy is used as the random distribution measure of the dwell point of the removal function and the local random machining path is designed based on entropy increasing theory to effectively suppress the medium- and high-frequency errors of the MRF polishing. The KDMRF-1000F magnetorheological polishing machine Experimental results show that the mid- and high-frequency errors of the local random path processing area are significantly smaller than those of the raster scanning path processing area.The mirror with the diameter of 98mm can be repaired by one iteration (7.46min) and the peak-to-area error can be increased to 0.062λ (λ = 632.8nm ), The root mean square error is increased to 0.010λ, and no obvious spike-like mid-high frequency error is observed.The experimental results show that the local random path design based on the principle of entropy increase can effectively suppress medium- and high-frequency errors in MRF processing.