为了有效改善基于无机材料的可变光衰减器(VOA)功耗大以及全聚合物VOA响应速度慢的问题,设计并研制了一种基于有机聚合物/无机SiO2材料的马赫曾德尔干涉仪(MZI)型VOA器件。根据脊型波导结构的单模传输条件,设计并优化了单模波导的截面尺寸,同时对器件结构进行了模拟,采用光刻和显影等工艺制备出功耗较低、响应速度快的VOA器件。在1550nm通信波长下,器件的衰减范围为23dB,最大功耗仅为14mW,器件的上升时间为252μs,下降时间为384μs。实验结果表明,采用有机/无机混合波导结构,并通过对器件结构参数的优化,可以实现功耗低且响应快速的VOA器件。 In order to effectively improve the power consumption of Variable Optical Attenuators (VOA) based on inorganic materials and the slow response of all-polymer VOA, a Mach-Zehnder interferometer based on organic polymer / inorganic SiO2 MZI) type VOA device. According to the single-mode transmission condition of ridge waveguide structure, the cross-sectional size of the single-mode waveguide is designed and optimized. At the same time, the structure of the device is simulated. The VOA device with low power consumption and high response speed . At 1550nm communication wavelength, the attenuation range of the device is 23dB, the maximum power consumption is only 14mW, the device rise time is 252μs, the fall time is 384μs. The experimental results show that the VOA device with low power consumption and fast response can be realized by adopting the organic / inorganic hybrid waveguide structure and optimizing the structural parameters of the device.