论文部分内容阅读
为了了解旋转对邱克拉斯基(Czochralski)晶体生长结构液池内熔体流动的影响,利用有限差分法进行了三维非稳态数值模拟,坩埚外半径为50 mm,晶体半径为15 mm,液池深度为50 mm。结果表明,当旋转速度较低时,流动为稳态轴对称流动,随着转速的提高,流动会转化为三维非稳态振荡流动;晶体与坩埚同向旋转时,流动转化的临界转速较高,反向旋转时,临界转速较低;晶体单独旋转时,速度波周向速度远小于晶体旋转速度,坩埚单独旋转时,速度波周向速度与坩埚旋转速度保持一致;坩埚转速越快,速度波动幅度和波数越小。
In order to understand the effect of rotation on the melt flow in the liquid pool of Czochralski crystal growth structure, three-dimensional unsteady numerical simulation was carried out by finite difference method. The outer radius of the crucible was 50 mm and the crystal radius was 15 mm. Depth of 50 mm. The results show that when the rotation speed is low, the flow is steady-state axisymmetric flow, and the flow changes into a three-dimensional unsteady oscillation flow as the rotation speed increases. The critical rotation speed of the flow conversion is higher when the crystal rotates in the same direction with the crucible , When the reverse rotation, the critical speed is lower; when the crystal is rotated alone, the circumferential velocity of the velocity wave is far less than the rotation speed of the crystal. When the crucible is rotated separately, the circumferential velocity of the velocity wave is consistent with the rotation speed of the crucible; the faster the rotation speed of the crucible, Fluctuation and wave number smaller.