,An Optical MIM Pressure Sensor Based on a Double Square Ring Resonator

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In this paper,we have proposed a metal-insulator-metal (MIM) pressure sensor which consists of two plasmonic waveguides and a double square ring resonator.The two square rings are connected via a rectangular patch located between the two of them.The surface plasmon polaritons (SPPs) can be transferred from a square ring to the other through this patch.The finite-difference time-domain method (FDTD) has been used to simulate the device.Applying a pressure on the structure,it deforms,and a red shift of 103 nm in the resonance wavelength has been calculated.The deformation is linearly proportional to the wavelength shift in a wide range of wavelength.The proposed optical plasmonic pressure sensor has a sensitivity of 16.5nm/MPa which makes it very suitable for using in biological and biomedical engineering.
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