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本文介绍了超高真空分子束外延生长有机薄膜的技术及其研究进展 ,讨论了外延材料的纯化过程和杂质对外延薄膜结构的影响 ;从理论和实验观点评论了薄膜的生长性质和膜的有序结构。超高真空有机分子束外延技术是一种多用途的高技术 ,可以生长有机、无机、有机 /无机混和的薄膜结构。这种薄膜结构是未来光学和电子器件有希望应用的新一类工程材料。
In this paper, the technology of ultra-high vacuum molecular beam epitaxy and its research progress are introduced. The purification process of epitaxial materials and the influence of impurities on the structure of epitaxial thin films are discussed. The properties of the films and the effects of Order structure. Ultra-high vacuum organic molecular beam epitaxy technology is a multi-purpose high-tech, can grow organic, inorganic, organic / inorganic hybrid thin film structure. This thin film structure is the future of optical and electronic devices promising new class of engineering materials.