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利用纳米划痕仪研究了Ti合金表面类金刚石薄膜在划擦过程中的弹塑性变形和裂纹形成微观机制.结果表明:试样在划擦过程经历了薄膜变形、薄膜与基体共同变形和薄膜剥离3个阶段,对应的P—D曲线分别在划擦前后无变化、出现分离和急剧变化.在第三阶段中塑性变形量超过弹性变形量,在薄膜内部产生裂纹,薄膜与基体变形恢复不同步,薄膜发生剥落.因此,提高薄膜划擦抗力的有效途径是增强膜基的结合强度和提高薄膜的断裂韧性.
The nano-scratch tester was used to study the elastic-plastic deformation and crack formation micro-mechanism of Ti-like diamond-like carbon films during scratching process. The results show that the specimen undergoes three stages of film deformation, film deformation and film delamination during the scratching process. The corresponding P-D curves have no change before and after the scratching process, and the separation and abrupt change occur. In the third stage, the amount of plastic deformation exceeds the amount of elastic deformation, and cracks are generated in the film. The deformation of the film and the substrate is not synchronized, and the film peels off. Therefore, an effective way to improve the film scratch resistance is to enhance the bonding strength of the film-based and improve the fracture toughness of the film.