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三、四棱尺1.工作面的表面光洁度要求:工作面的表面光洁度,应不低于12级。检定方法:工作面的表面光洁度,应用干涉显微镜或轮廓仪进行检定。使用中的四棱尺,这项可不检定。2.工作面的平直度要求:A 面(见图8所示)的平直度偏差,应不大于0.5微米(使用中的)或0.3微米(新制的)。B、C 两面的平直度偏差,应不大于1微米。检定方法:A 面的平直度,应用直径为100毫米的一级平晶以分段法进行检定。B、C两面的平直度,应用直径为100毫米的二级平晶以分段法进行检定。
Three or four prism ruler 1 surface finish requirements: surface finish, should not be less than 12. Test methods: the surface finish of the work surface, the application of interference microscopy or profiler for testing. Use the four-foot, this can not test. 2. Face Flatness Requirements: The flatness deviation of face A (see Figure 8) shall not be greater than 0.5 microns (in use) or 0.3 microns (freshly made). B, C flatness deviation on both sides, should not exceed 1 micron. Test Method: A flatness, the use of a diameter of 100 mm flat crystal to segmented test. B, C both sides of the flatness, the application of 100 mm in diameter two flat crystal to test the segmented method.