由于碳纳米管具有独特的结构和性能 ,因而自从被发现以来一直受到人们的关注。近年来 ,已利用各种方法成功地合成出碳纳米管 ,特别是利用化学气相沉积方法制备高度准直的碳纳米管。分析了该方法中催化剂厚度对碳纳米管直径的影响 ,利用负衬底偏压热灯丝CVD系统和不同厚度的NiFe催化剂在Si衬底上直接生长 ,并用扫描电子显微镜来研究碳纳米管的生长过程。结果表明催化剂颗粒封闭了碳纳米管的顶端 ,催化剂厚度对碳纳米管的直径有较大的影响 ,碳纳米管的平均直径随催化剂厚度的增大而增大 Due to its unique structure and properties, carbon nanotubes (CNTs) have been attracting attention since their discovery. In recent years, various methods have been used to successfully synthesize carbon nanotubes, in particular, chemical vapor deposition to prepare highly-aligned carbon nanotubes. The influence of the catalyst thickness on the diameter of the carbon nanotubes was analyzed. The growth of the carbon nanotubes was directly observed on a Si substrate by using a negative substrate-biased hot filament CVD system and NiFe catalysts with different thicknesses. Scanning electron microscopy process. The results show that the catalyst particles close the top of the carbon nanotubes and the catalyst thickness has a great influence on the diameter of the carbon nanotubes. The average diameter of the carbon nanotubes increases with the increase of the catalyst thickness