为了提高Y型腔正交偏振氦氖激光器的输出光特性,对激光器的腔体结构、增益区光路以及偏振分光片的加工工艺进行改进,研制出了新型一体化Y型腔正交偏振氦氖激光器。介绍了该激光器的基本结构和工作原理,实验测试了激光器的输出光模式、输出光功率、频差闭锁特性和频差稳定性。与先前分立式结构的Y型腔正交偏振激光器相比较,详细分析了改进后的激光器的优势,特别指出了其在频差稳定性方面的提升。实验结果表明,利用一体化Y型腔结构可以实现激光器的频率分裂;通过调节P子腔反射镜上压电陶瓷的电压,可以线性调节激光器的输出频差;相比于分立式Y型腔激光器,一体化Y型腔正交偏振氦氖激光器的输出光功率提高至647μW,频差闭锁阈值降低至12 MHz,频差范围提高至12~1038 MHz,频差稳定性提高至1.2×105Hz。 In order to improve the output light characteristics of the Y-type orthogonally polarized He-Ne laser and to improve the cavity structure of the laser, the optical path of the gain region and the processing of the polarization beam splitter, a new integrated Y-type cavity orthogonal polarization helium-neon Laser. The basic structure and working principle of this laser are introduced. The laser output light mode, output optical power, frequency difference blocking characteristic and stability of frequency difference are experimentally tested. Compared with the previous Y-cavity orthogonally polarized laser with discrete structure, the advantages of the improved laser are analyzed in detail, especially the improvement in stability of frequency difference is pointed out. The experimental results show that the laser frequency splitting can be realized by the integrated Y-type cavity structure; the output frequency difference of the laser can be linearly adjusted by adjusting the voltage of the PZT mirror on the piezoelectric ceramic; compared with the discrete Y-type cavity The output optical power of the laser and the integrated Y-type orthogonally polarized HeNe laser is increased to 647μW, the frequency difference blocking threshold is reduced to 12 MHz, the frequency difference range is increased to 12-1038 MHz, and the frequency stability is improved to 1.2 × 105Hz.