In this paper the hydrogen and hydrocarbon gas sensing performance of the Pt/Catalysed TiO_2/SiC devices have been studied.The TiO_2 metal oxide thin films were catalytically modified employing Pt and Pd.The electrical properties of the fabricated devices were studied by measuring their capacitance-voltage (C-V),conductance-voltage (G-V) and dynamic response characteristics.The sensor’s response as a function of operating temperature (25℃to 700℃) and concentrations less than 1% of the analyte gases have been investigated.The sensitivity of the Pt catalysed TiO_2 sensor was found to be superior when compared to TiO_2 catalysed with Pd.A voltage shift of 3.2 V for 1% propene at 420℃and 2.8 V for 1% hydrogen at 250℃in an ambient containing synthetic air was recorded for the Pt catalysed TiO_2 sensor.The response of Pt catalysed TiO_2 sensor was found to be approximately 4 times larger when compared to the non catalysed counterpart. In this paper the hydrogen and hydrocarbon gas sensing performance of the Pt / Catalysed TiO 2 / SiC devices have been studied. TiO 2 metal oxide thin films were catalytically modified employing Pt and Pd. Electrical properties of the fabricated devices were studied by measuring their capacitance The sensor’s response as a function of operating temperature (25 ° C to 700 ° C) and the concentration less than 1% of the analyte gases have been investigated. The sensitivity of the Pt catalysed TiO 2 sensor was found to be superior when compared to TiO 2 catalysed with Pd. A voltage shift of 3.2 V for 1% propene at 420 ° C and 2.8 V for 1% hydrogen at 250 ° C in an ambient containing synthetic air was recorded for the Pt catalyzed TiO_2 sensor. The response of Pt catalysed TiO_2 sensor was found to be about 4 times larger when compared to the non catalysed counterpart.