论文部分内容阅读
在科学仪器制造中对精密加工表面平面度的要求,其允许偏差常小于使用的测量仪器和测量方法的测量不确定度。特别对≥1000×1000mm 的测量表面,平面度的偏差常小于1μm,这样的要求对微电子仪器的生产是很必要的,工艺水平的最重要的成分是平面度测量技术。
The requirements for precision machined surface flatness in the manufacture of scientific instruments are often less than the measurement uncertainty of the measuring instruments and measuring methods used. Especially for the measuring surface of ≥ 1000 × 1000mm, the deviation of the flatness is often less than 1μm. Such requirement is necessary for the production of microelectronic instruments. The most important component of the process level is the flatness measurement technology.