引言光学零件表面疵病检查仪是用来定量检测光学零件表面疵病的仪器(以下简称疵病检查仪)。它的工作原理是将He-Ne激光器发出的光束经扩束和聚焦,使光束焦点落在被测透镜表面上,聚焦光点由透镜中心向边缘作螺旋扫描。当光点遇到划痕或斑点时产生脉冲信号,累计脉冲的宽度就可实现对表面疵病的自动检测。从已收集到的资料,我们知道国外的同类仪器和国内正在研制的仪器其电气控制部分均是 Introduction Optical parts surface defect inspection instrument is used to quantitative detection of optical parts surface defects of the instrument (hereinafter referred to as flaw detector). Its working principle is to expand and focus the beam emitted by He-Ne laser so that the focus of the beam falls on the surface of the lens under test. The focused spot is scanned spirally from the center of the lens to the edge. When the light spots when scratches or spots produce a pulse signal, the cumulative width of the pulse can be achieved on the surface defect detection. From the information we have collected, we know that the electrical control parts of similar instruments abroad and the instruments under development in China are all