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通过建模的方法对所研制的一种毫微米级微进给机构的原理进行了分析,结合实验结果提出了有关结构参数的设计要点。并从动静态的角度分析了其定位精度的影响因素,提出了减少误差、提高系统稳定性的措施。
Through the method of modeling, the principle of a micro-feed mechanism of the nanometer level developed was analyzed, and the design points of the structure parameters were put forward based on the experimental results. From the static and dynamic perspectives, the influencing factors of the positioning accuracy are analyzed, and the measures to reduce the errors and improve the stability of the system are proposed.