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以SiN为材料,采用与CMOS工艺相兼容的技术,制备了波导宽度为1μm,半径为400μm的SiN光学微环。经测量,其品质因数(Q值)高达20 000,自由光谱范围(FSR)为0.5 nm。提出了采用光学微环传感器、单波长光源和光功率计对待测物进行测量的方案。实验证明,该方案与传统的采用光谱仪测量谐振峰值漂移的方法相比,可以取得更高的系统探测灵敏度。最后,利用微环传感器对葡萄糖溶液浓度进行测量,灵敏度高达10-4折射率单元(RIU),证明了该传感器可以应用于溶液检测领域。
Using SiN as the material, a SiN optical microring with a waveguide width of 1 μm and a radius of 400 μm was prepared by a CMOS technology compatible technique. The measured Q factor is as high as 20 000 and the free spectral range (FSR) is 0.5 nm. Proposed the use of optical micro-ring sensor, single-wavelength light source and optical power meter to be measured on the measurement program. Experiments show that this scheme can obtain higher system detection sensitivity compared with the traditional method of measuring resonance peak drift by using spectrometer. Finally, the micro-loop sensor was used to measure the concentration of glucose solution with the sensitivity of 10-4 refractive index unit (RIU), which proves that the sensor can be used in the field of solution detection.