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本文讨论了对积分散射测量的超光滑表面均方粗糙度进行修正的问题,得出结论:可以直接依赖于散射理论从积分散射测量确定表面粗糙度值。
This paper discusses the problem of correcting the mean square roughness of an ultra-smooth surface measured by the integral scattering and concludes that the surface roughness value can be determined from the integral scattering measurement directly from the scattering theory.