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采用超声喷雾热解成膜技术制备透明SnO2薄膜,用XRD、UV/Vis、SEM、电导温度曲线等系统研究了衬底温度、反应液中双氧水浓度与SnO2薄膜的结构、形貌和光学、电学性质的关系。结果表明,衬底温度与薄膜的微结构和电阻率有密切的关系;加入适量双氧水能使制备的薄膜晶粒均匀,表面形貌有所改善并得到透明高阻SnO2薄膜。
Transparent SnO2 thin films were prepared by ultrasonic spray pyrolysis and the substrate temperature, the concentration of hydrogen peroxide in the reaction solution and the structure, morphology and optical and electrical properties of SnO2 thin films were studied by XRD, UV / Vis, SEM and conductivity temperature curves. The nature of the relationship. The results show that the substrate temperature is closely related to the microstructure and resistivity of the film. Adding appropriate amount of hydrogen peroxide can make the prepared film have uniform crystal grains and improve the surface morphology and obtain the transparent high resistance SnO2 film.