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采用低温等离子体辅助氮化奥氏体不锈钢316L,能够在不破坏其抗腐蚀性能的同时有效提高不锈钢表面的摩擦学性能,研究了不同脉冲偏压下氮化层的结构和摩擦学性能(硬度、摩擦系数和耐磨性)。采用X射线衍射仪研究了脉冲偏压对氮化层相结构的影响;采用光学显微镜和扫描电镜分别观察了氮化层表面和横截面的形貌,并利用能量色散谱测量了氮化层中氮含量及其分布;基于纳米压痕和摩擦磨损结果,研究了脉冲偏压对氮化层摩擦学性能的影响。结果表明:低温氮化后,不锈钢表面形成一层无氮化物析出的单一过饱和固溶体相——扩展奥氏体γN,晶格常数随偏压的增加由0.359增至0.395nm。当脉冲偏压为-300 V时,氮化层厚度达9.45μm,表面硬度达21.0 GPa,摩擦系数降低至0.09,耐磨性能获得显著提高。
The low temperature plasma assisted nitrided austenitic stainless steel 316L can effectively improve the tribological properties of the stainless steel without damaging its corrosion resistance. The structure and tribological properties of the nitrided layer under different pulse bias (hardness , Friction coefficient and wear resistance). The influence of pulse bias on the phase structure of nitrided layer was investigated by X-ray diffraction. The surface morphology and cross-section of the nitride layer were observed by optical microscope and scanning electron microscope respectively. The energy dispersive spectra Nitrogen content and its distribution. Based on the results of nanoindentation and friction and wear, the influence of pulse bias on the tribological properties of nitride coatings was investigated. The results show that a single supersaturated solid solution phase - extended austenite γN is formed on the surface of stainless steel after low temperature nitriding. The lattice constant increases from 0.359 to 0.395 nm with the increase of bias voltage. When the bias voltage is -300 V, the thickness of the nitride layer reaches 9.45 μm, the surface hardness reaches 21.0 GPa, the friction coefficient decreases to 0.09, and the wear resistance can be significantly improved.