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和传统光谱仪相比,微型光谱仪的分辨率较低,但由于它体较小、价格便宜等优点广泛应用于许多测量、控制领域。讨论了微型光谱仪结构特点、关键技术和发展趋势;对多种微型光谱仪的工作原理和相应的工艺流程做了较为详细的总结;结合国内微型光机电系统制作工艺,分析了几类微型光谱仪的制作难点及其设计方案的可行性。探讨了在分辨率要求不太高的情况下微型光谱仪的多个潜在应用领域。
Compared with the traditional spectrometer, the miniature spectrometer has a lower resolution but is widely used in many measurement and control fields because of its small size and low price. The structure, key technologies and development trends of micro-spectrometer are discussed. The working principle and corresponding process flow of micro-spectrometer are summarized in detail. According to the fabrication technology of micro-electro-optical system in China, the production of several kinds of micro-spectrometers Difficulties and the feasibility of its design. Several potential applications of the micro-spectrometer in the case of less demanding resolution are discussed.