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高溫扩散炉程序控制装置是应我国大规模集成电路工业发展的急需,针对我国半导体工业的实际情况研制而成的。它的主要特点是:(一)全部采用国产元件,造价低,稳定可靠,可以与各种新旧扩散炉配套使用;(二)技术参数调节范围大,功能齐全,应用广泛,可以满足大规模集成电路以及其它各种半导体器件生产的需要,(三)显示明确,使用维护方便,不需要特殊机器环境,不需要专门培训操作人员。
High-temperature diffusion furnace program control device is the urgent need of the development of China's large-scale integrated circuit industry, developed for the actual situation of China's semiconductor industry. Its main features are: (a) all the domestic components, low cost, stable and reliable, with a variety of old and new diffusion furnace supporting the use of; (B) the technical parameters of the adjustment range, full-featured, widely used to meet the large-scale integration Circuit and other kinds of semiconductor devices. (3) The display is clear, the use and maintenance are convenient, the special machine environment is not needed, and the operator is not required to be specially trained.