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本文以化学键的观点,解释了金刚石的(C-C,SP~3键)的许多性质。主要由C-C、SP~3键构成的碳膜定义为金刚石状碳薄膜(DLC)。DLC膜的特性接近于金刚石晶体。因为SP~2键在常温常压下是稳定的,所以DLC膜形成于诸如等离子体过程等非平衡状态。在一些等离于体工艺中,我们着重于反应性溅涂,它和一般的物理溅涂不同。在反应性溅涂的沉积层中,氢游离基被认为是对石墨标板呈化学溅射,并有选择地在基片上沉积出主要由SP~3键构成的薄膜。我们还讨论了用来区刀DLC薄膜中化学键和微结构的表征技术。
In this paper, we explain the many properties of diamond (C-C, SP ~ 3 bonds) from the perspective of chemical bonds. A carbon film mainly composed of C-C and SP-3 bonds is defined as a diamond-like carbon film (DLC). DLC film characteristics close to the diamond crystal. Since the SP ~ 2 bond is stable at normal temperature and pressure, the DLC film is formed in an unbalanced state such as a plasma process. In some plasma-based processes, we focus on reactive sputtering, which is different from normal physical sputtering. In reactive sputter-deposited layers, hydrogen radicals are believed to chemically sputter the graphite target and selectively deposit a thin film of SP3 bonds on the substrate. We also discussed the characterization techniques used for chemical bonding and microstructure in zone-DLC films.