基于非晶硅薄膜材料的微测辐射热探测器凭借其成本低、结构简单、可大规模生产等优势,在过去十几年间发展迅速,其焦平面阵列由最初的160×120小规模发展到目前的1024×768大规模,像元间距也由50μm减少到17μm。简要介绍了作为微测辐射热探测器的热敏电阻材料的优缺点,重点评述了具有代表性的非晶硅微测辐射热探测器的研究现状及发展趋势。 Based on the advantages of low cost, simple structure and large-scale production, the microbolometer detector based on amorphous silicon thin film has been developing rapidly in the past ten years. The focal plane array has been developed from the initial small size of 160 × 120 The current 1024 × 768 large-scale, pixel spacing from 50μm to 17μm. The advantages and disadvantages of thermistor materials as microbolometer detectors are briefly introduced. The research status and development trend of representative amorphous silicon microbolometer detectors are reviewed.