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本文主要阐述应用微细加工技术研究和开发1 mm电磁型微电机定子绕组的制备工艺。采用高 -高比光刻技术和掩模电镀工艺 ,解决了高 -高宽比线圈的制备工艺 ,有效地降低了线圈的直流电阻 ,另外用 Al2 O3薄膜溅射工艺解决了线圈层间的绝缘 ,并且提高了线圈的抗发热等级。本研究结果为 4层 2 8圈 3对 9组绕组系统。微电机定子绕组直径为 1 mm,最小线间距为 1 μm,最大工作电流可达 1 80 m A,单相直流电阻在 1 0— 2 0Ω之间。
This paper describes the application of micro-machining technology research and development of 1 mm electromagnetic micro-motor stator winding preparation process. High-to-high ratio lithography and mask electroplating process are adopted to solve the problem of high-aspect-ratio coil manufacturing process and effectively reduce the DC resistance of the coil. In addition, Al 2 O 3 thin film sputtering process solves the problem of insulation between coil layers and Increases the coil’s resistance to heat. The results of this study are 4 layers, 28 coils, 3 pairs and 9 winding systems. The micromotor stator windings have a diameter of 1 mm, a minimum line spacing of 1 μm, a maximum operating current of up to 180 mA, and a single-phase DC resistance of 10-20 Ω.