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根据设计载荷 ,从工作台结构、直线电机选型、位置测量和控制系统等多方面阐述了一种直线电机驱动位移的机构设计方法和控制原理。实际应用表明 ,该直线电机驱动的位移机构其位置精度可达微米级
According to the design load, a mechanism design method and control principle of linear motor driven displacement are expounded from the aspects of workbench structure, linear motor selection, position measurement and control system. The practical application shows that the linear motor driven displacement mechanism can achieve the position accuracy of micrometer