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本文着重介绍了在对固体表面态和表面组成的研究中,利用俄歇电子能谱(AES)和X光电子能谱(XPS)同扫描电子显微镜(SEM)相结合的方法,能够直接得到二次电子分布的图像表面各元素组分的相对含量以及各元素在不同环境表面所处的价态.通过对几种在不同条件下制备的催化剂及CaSeTe/Ti薄膜电极表面的实际考察,发现制备条件不同时,催化剂的内部结构组成有明显的变化,其表面元素分布也不相同;CaSeTe/Ti薄膜电极氧化层厚度随烧结环境而改变.实验结果表明,电子能谱法在研究固体表面态和组成分布中能给以清晰直观的图像,灵敏敏度高,其测试结果对固体表面态的研究提供十分有用的信息.
This article focuses on the combination of Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) with scanning electron microscopy (SEM) in the study of solid surface states and surface composition. The relative content of each elemental component in the surface of the electron distribution and the valency of each element in different environmental surfaces.According to the actual investigation on the surface of the catalyst and CaSeTe / Ti thin film electrode prepared under different conditions, it was found that the preparation conditions At the same time, the internal structure and composition of the catalyst changed obviously, and the elemental distribution of the surface was also different. The thickness of the oxide layer of CaSeTe / Ti thin film changed with the sintering environment.The experimental results showed that the surface energy and composition Distribution can give a clear and intuitive image, high sensitivity, the test results on the solid surface state of the study provides very useful information.