应用材料公司推出Applied DFinder检测系统,用于在22纳米及更小技术节点的存储和逻辑芯片上检测极具挑战性的互连层。作为一项突破性的技术,该系统是首款采用深紫外(DUV)激光技术的暗场检测工具,使芯片制造商具有前所未有的能力,在生产环境中检测出图形化晶圆上极小的颗粒缺陷,从而提 Applied Materials has introduced the Applied DFinder detection system to detect challenging interconnect layers on storage and logic chips at 22nm and smaller technology nodes. As a breakthrough technology, the first dark-field inspection tool using deep-UV (DUV) laser technology enables chipmakers unprecedented capability to detect extremely small Particle defects, which mention