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根据微细电解加工中工具电极下端面面积远小于工件表面的非对称特征,在水基中性盐钝性电解液侧流冲入和金属电极处于钝化状态的条件下,提出了一种基于双电层电容的微细电解加工间隙的在线检测方法.在微细工具电极和/或工件上不外加传感器的前提下,利用工具电极/溶液界面上双电层电容值随加工间隙增大而单调递增的变化关系,精确、快速地实现加工间隙的在线检测.在冲液速度为1.058 m/s的条件下,当加工间隙在0~100μm时,可在数毫秒内在线检测出微细电解加工间隙的大小,数值仿真与实验测量值之间的最大相对误差小于10%.为实现高精度、高质量、稳定的微细电解加工提供必要条件.
According to the asymmetric characteristics that the area of the lower end of the tool electrode is much smaller than the surface of the workpiece in the micro-electrolysis process, under the condition of the side-flow inflow of the water-based neutral salt blunt electrolyte and the passivation of the metal electrode, On the premise of no extra sensor on the micro-tool electrode and / or workpiece, the electric double-layer capacitance value at the tool electrode / solution interface monotonically increases with the increase of the processing gap The relation between the machining gap and the machining gap can be accurately and quickly realized.When the machining speed is 1.058 m / s, the machining gap can be detected in milliseconds , The maximum relative error between numerical simulation and experimental measurement is less than 10%, which provides the necessary conditions for the realization of high-precision, high-quality and stable micro-electrolysis.