Visible-light communication (VLC) stands as a promising component of the future communication network by providing high-capacity, low-latency, and high-security wireless communication. Superluminescent diode (SLD) is proposed as a new light emitter in the
This contribution presents a magnetron sputter deposition tool with broadband optical monitor and online re-optimization capability for high volume production. The layer termination relies on a comparison of the actually measured reflection spectrum with