1 引言目前正积极研究13~14nm区真空紫外激光振荡的可能性，因为在该波长区发展了反射率达到60%的多层膜反射镜的制造方法[1~3]。该区较强激光可用于微光刻、X射线显微术和生物技术等。最近几年正在探讨建立真空紫外激光器的新实验途径。例如，研究了在脉宽0.9~10 ns、能量~0.7 1 Introduction At present, the possibility of vacuum ultraviolet laser oscillation in the 13-14 nm region is being actively studied because of the development of the manufacturing method of multilayer mirror with reflectivity of 60% in this wavelength region [1-3]. The strong laser in this area can be used in microlithography, X-ray microscopy and biotechnology. In recent years is to explore the establishment of vacuum ultraviolet laser new experimental approach. For example, we studied the pulse width 0.9 ~ 10 ns, energy ~ 0.7