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为实现低成本原子力显微镜(AFM)探针的制备,开展了基于6英寸(1英寸=2.54 cm)绝缘衬底上的硅(SOI)的AFM探针制备方法的研究,实验分析了采用KOH湿法腐蚀纳米硅针尖的时间对针尖形貌的影响,给出了纳米硅针尖的缺陷类型以及产生缺陷针尖的原因,同时针对深硅干法刻蚀过程中散热不均的现象,提出采用导热系数高的黏接材料来改善散热问题。实验结果表明,基于6英寸SOI制备的AFM探针悬臂梁厚度偏差为±0.5μm,成品率大于90%,对制备的自锐式AFM探针与商用AFM探针进行了测试对比,自制AFM探针的扫描质量达到了当前商用探针的水平,满足形貌表征的需求。
In order to prepare low-cost atomic force microscopy (AFM) probes, the AFM probe preparation method based on silicon (SOI) on a 6 inch (1 inch = 2.54 cm) insulating substrate has been studied. The influence of the time of nano-silicon tip etching on the topography of the tip is given. The defects of the nano-silicon tip and the reason of the defect tip are given. According to the phenomenon of uneven heat dissipation during the deep dry etching process, the thermal conductivity High bonding materials to improve heat dissipation. The experimental results show that the AFM probe based on 6-inch SOI has a thickness deviation of ± 0.5μm and a yield of more than 90%. The prepared self-sharpening AFM probe is compared with commercial AFM probe. The AFM probe The scanning quality of the needle has reached the level of the current commercial probe, to meet the needs of the morphological characterization.