一、前言用物理气相沉积的方法,在工模具表面镀覆一层超硬的金属陶瓷薄膜(如 TiN,TiCAl_2O_3等),可以成倍的提高工模具的寿命,还可以提高刀具的切削速度,和加工高硬度的工件,因此该项技术发展迅速,在国外镀层刀具的使用量已占所有刀具的30～50%,个别工业发达的国家已达50～70%,并且还在增加中。磁控溅射是物理气相沉积工艺中 I. Preface By physical vapor deposition, a layer of super-hard cermet film (such as TiN, TiCAl 2 O 3, etc.) is plated on the surface of the tooling to increase the service life of the tooling and increase the cutting speed of the tooling. And the processing of high hardness of the workpiece, so the rapid development of the technology, the use of coated tools in foreign countries have accounted for 30 to 50% of all tools, some industrialized countries have reached 50 to 70%, and is still increasing. Magnetron sputtering is a physical vapor deposition process