Precise alignment of off-axis three-mirror reflecting optical system based on phase diversity

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Phase diversity (PD) is a kind of wavefront sensing technology based on image collecting and post-processing. We apply the PD technology to align an off-axis three-mirror reflecting anastigmatic system precisely. It can be concluded that the wavefront error obtained by PD agrees well with the interferometric result. The focused images are also restored according to the testing results of PD, and the qualities of restored images are improved.
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