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采用流体模型,研究含杂质多离子成分等离子体的碰撞鞘,首先导出描述碰撞鞘的非线性方程组,然后采用数值方法研究鞘宽和离子注入能量与等离子体参数的依赖关系。结果表明,碰撞率及杂质(尘埃)密度对鞘宽和离子注入能量有显著影响。
Using the fluid model, the collision sheath of a plasma containing impurity ions is studied. Firstly, the nonlinear equations describing the collision sheath are derived. Then the dependence of the sheath width and ion implantation energy on the plasma parameters is studied numerically. The results show that the collision rate and impurity (dust) density have a significant impact on the sheath width and ion implantation energy.