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光电位置敏感器件（ＰＳＤ）是一种可直接对其光敏面上的光斑位置进行检测的光电器件，基于ＰＳＤ可构成多种非接触的高精度动态位移监测仪器。在ＰＳＤ器件使用中的一个关键问题是如何克服各种杂光干扰，以提高检测的精度和可靠性。根据ＰＳＤ的原理及其特征方程，分析了杂光在ＰＳＤ上的两类作用模式，并根据ＰＳＤ特征方程推导了存在杂光干扰时ＰＳＤ输出信号与杂光的关系，及杂光导致的位置误差方程。根据上述推导，文章给出了３种克服杂光干扰的实用方法。
Photoelectric position sensitive device (PSD) is a kind of optoelectronic device which can directly detect the spot position on the photosensitive surface. Based on PSD, it can form a variety of non-contact high precision dynamic displacement monitoring instruments. A key issue in the use of PSD devices is how to overcome various stray light interferences to improve the accuracy and reliability of the detection. According to PSD principle and its characteristic equation, two kinds of action modes of stray light on PSD are analyzed. According to the PSD characteristic equation, the relationship between PSD output signal and stray light in the presence of stray light interference and the position error caused by stray light equation. According to the above derivation, the article gives three practical methods to overcome stray light interference.