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本文根据Michael P.Chrisp提出的平面对称光栅系统波象差理论,叙述了用象散参考面确定波像差,再由波像差得到最后像面的点列图分布之计算方法,并建立了计算程序。经运算表明,该方法得到的结果与光线迫迹的结果相当符合。
According to the wave aberration theory of plane symmetric grating system proposed by Michael P.Chrisp, this paper describes the method of calculating the distribution of point column by using the astigmatic reference surface to determine the wave aberration and then the final image surface by wave aberration. Calculation procedures. The calculation shows that the results obtained by this method are in good agreement with the results of light-induced tracking.