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用脉冲激光沉积在不同条件下制备非晶碳超硬薄膜,研究了非晶碳超硬薄膜的表面形貌、结构、应力、硬度以及能谱等。原子力显微镜和扫描电镜图像显示,薄膜表面平整、致密且光滑,均方根粗糙度最大为0.877 nm。在高激光重复频率、高激光通量条件下,薄膜有很大的应力,致使膜层褶皱甚至破裂,小角X射线衍射表明薄膜为非晶态且最大残余应力达30 GPa以上,但300℃温度的原位退火可以有效降低残余应力;纳米压痕测试表明薄膜硬度大于20 GPa,弹性模量大于200 GPa;X射线光电子能谱表明薄膜中sp3的含量在39%~53%之间变化,并且与激光通量成正比。
Pulsed laser deposition was used to prepare amorphous carbon superhard films under different conditions. The surface morphology, structure, stress, hardness and energy spectrum of amorphous carbon superhard films were studied. Atomic force microscopy and scanning electron microscopy images show that the film surface is smooth, dense and smooth, the maximum root mean square roughness of 0.877 nm. Under the condition of high laser repetition rate and high laser flux, the film has great stress, which causes the film to wrinkle or even rupture. The small angle X-ray diffraction shows that the film is amorphous and the maximum residual stress is more than 30 GPa, but the temperature of 300 ℃ In-situ annealing can effectively reduce the residual stress; nanoindentation test shows that the film hardness is greater than 20 GPa, the elastic modulus is greater than 200 GPa; X-ray photoelectron spectroscopy shows that the content of sp3 in the film varies between 39% and 53% Proportional to the laser flux.