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用连续波激光诱导扩散制作单片集成光接收机中的探测器时,激光照射形成的高温区面积很小.当入射激光焦斑光强为高斯分布甚至平顶帽形“分布时,微小扩散区温度分布的均匀性都不能达到实验的要求.提出了用掩模对入射高斯光束进行空间调制的方法来实现扩散区温度的均匀化.该方法的关键是计算出实现均匀的温度分布所需要的焦斑光强分布参数.给出了计算方法和计算实例.结果表明,均匀化后,在扩散区平均温度上升值为500K时,扩散区内的最大温度差为3 9 K,并且高温区的温度分布接近平顶帽形”.
When the detectors in the monolithic integrated optical receiver are diffused by continuous wave laser, the area of high temperature formed by the laser irradiation is very small.When the intensity of the incident laser spot is Gaussian distribution or flat cap The uniformity of the temperature distribution in the diffusion zone can not meet the requirements of the experiment.The method of using the mask to modulate the incident Gaussian beam in space is proposed to achieve the uniformization of the temperature in the diffusion zone.The key of this method is to calculate the uniform temperature distribution The required light intensity distribution parameters are given.The calculation methods and calculation examples are given.The results show that after the homogenization, when the average temperature of diffusion zone is 500K, the maximum temperature difference in the diffusion zone is 39K, and the high temperature Area temperature distribution close to flat hat ".