不同涂层对微粗糙基底的极化光散射影响

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为了研究涂层与基底间的极化光散射,应用一阶矢量衍射理论推导出基底极化双向反射分布函数(PBRDF)。将理论分析结果与实验数据比较并数值模拟分析了在相关和非相关模型下,SiO2和TiO2涂层厚度对PBRDF的影响。考察了不同折射率对基底PBRDF的影响。结果表明随着SiO2涂层厚度的增加,相关和非相关模型下的PBRDF逐渐靠近同时逐渐和裸基底重合,即能逐渐复现基底的粗糙度轮廓;随着TiO2涂层厚度的增加,PBRDF逐渐变大,即TiO2涂层对基底有较好的平滑作用。折射率的实部和虚部对PBRDF的影响相反。因此通过对不同涂层PBRDF进行测量和计算可以反演出基底的光学信息。 In order to study the polarized light scattering between the coating and the substrate, the first-order vector diffraction theory is used to derive the basal polarization birefringence distribution function (PBRDF). The theoretical analysis results are compared with the experimental data and the effects of SiO 2 and TiO 2 coating thickness on PBRDF are analyzed numerically by correlation and non-correlation models. The effects of different refractive indices on PBRDF were investigated. The results show that with the increase of SiO2 coating thickness, the PBRDF of the correlated and unrelated models gradually close to coincide with the bare substrate at the same time, that is, the roughness profile of the substrate can be gradually recovered. With the increase of TiO2 coating thickness, PBRDF gradually increases Becomes larger, that is, the TiO2 coating has a good smoothing effect on the substrate. The real and imaginary parts of the refractive index have the opposite effect on PBRDF. Therefore, the optical information of the substrate can be inverted by measuring and calculating PBRDF of different coatings.
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