引言 熔凝玻璃钝化是适合于高反压功率器件表面保护的稳定而可靠的钝化方法。在国外,目前许多高压整流器件、高反压功率器件和可控硅整流器等,都采用熔凝玻璃钝化。国内这项技术正被研究和应用。尽管这样,关于玻璃钝化膜性质的研究并不很多,而且由于制备薄玻璃股比较困难,在表面分析上还只限于C-V测试方面的工作。 INTRODUCTION Fused glass passivation is a robust and reliable passivation method suitable for surface protection of high back pressure power devices. Abroad, many high-voltage rectifier devices, high back-pressure power devices and silicon controlled rectifier, etc., are melted glass passivation. Domestic technology is being studied and applied. In spite of this, there are not many studies on the properties of glass passivation films, and because of the difficulty in preparing thin glass strands, the surface analysis is limited to C-V testing.