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搭建了感应读出方式紫外光子计数成像系统,详细介绍了该系统的组成、工作原理和分辨率性能测试.紫外光经过减光和滤光后入射微通道板,产生的光电子在微通道板内倍增后形成电子云,由呈高阻特性的半导体Ge薄膜收集后,通过电荷耦合感应到Ge膜衬底背面的位敏阳极.阳极输出的信号经过电荷灵敏前置放大器、整形放大器后由计算机进行数据采集和处理,最后得到不同位置的光子计数图像.通过分辨率板,测得了该系统分辨率为150μm,并通过对比试验和分布式RC网络理论模型分析了Ge膜电阻及其衬底厚度对系统性能的影响.该系统在生物超微弱发光、空间环境探测以及核辐射探测领域有广泛的应用前景.
The UV photon counting imaging system with sensing readout is set up and the composition, working principle and resolution performance test of the system are introduced in detail.The UV light is incident on the microchannel plate through dimming and filtering, and the photoelectrons generated in the microchannel plate Doubling the formation of an electron cloud from the high-resistance characteristics of the semiconductor Ge film collected by charge-coupled to the back of the Ge film-sensitive anode substrate anode output signal through the charge-sensitive preamplifier, plastic amplifier by the computer Data acquisition and processing, and finally the photon counting images of different positions were obtained.The resolution of the system was measured by the resolution plate to be 150μm, and the resistivity of Ge film and the thickness of the substrate were analyzed by comparison test and distributed RC network theoretical model System performance.The system has a wide range of applications in the field of biological ultra-weak luminescence, space environment detection and nuclear radiation detection.