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使用原子力显微镜(AFM)中的侧向力(LFM)模式对类金刚石膜纳米尺度的摩擦现象进行了研究,主要考察了载荷、微观形貌、粘附对类金刚石膜纳米摩擦性能的影响。首先结合粘附的影响提出了适用于外加载荷在100nN以下类金刚石膜纳米摩擦力表征的修正Amonton公式。其次,试验发现摩擦过程中表面接触峰的斜率对薄膜的微观摩擦力的影响较大,微观摩擦系数与倾角θ成正比例关系,最后结合两者给出了综合考虑载荷、表面形貌、粘附且可用于类金刚石膜纳米尺度摩擦力表征的数学方法。
Friction phenomenon of diamond-like carbon nanoscale was investigated by using lateral force (LFM) mode in atomic force microscopy (AFM). The effects of loading, microstructure and adhesion on the nanocomposites friction were investigated. In the first place, the modified Amonton formula suitable for the characterization of nano-tribological friction of diamond-like carbon films with an applied load below 100nN is proposed based on the influence of adhesion. Secondly, it is found that the slope of the surface contact peak in the friction process has a great influence on the micro-friction of the film. The micro-friction coefficient is in direct proportion to the inclination angle θ. Finally, And can be used for the diamond-like carbon nanoscale frictional characterization of mathematical methods.