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在真空抽气系统中 ,增压泵与维持泵之间常用电磁充气阀来对维持泵进行停泵充气 ,但电磁充气阀工作可靠性低 ,生产和使用费用高 ,且容易被烧坏。本文介绍了一种带充气气动阀的结构原理及应用 ,它除具有电磁充气阀的功能外 ,还具有结构简单、制造成本低、维修简便、工作可靠性高等优点。
In the vacuum pumping system, the commonly used electromagnetic charging valve between the booster pump and the maintenance pump is used to pump the maintenance pump to stop pumping. However, the reliability of the electromagnetic charging valve is low, and the production and use are expensive and easily burnt out. In this paper, a kind of pneumatic pneumatic valve with inflatable structure principle and application, in addition to its function of electromagnetic inflatable valve, but also has the advantages of simple structure, low manufacturing cost, easy maintenance, high reliability of work.