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磁控溅射温度控制系统的精度和运行稳定性对沉积结构稳定和性能优良的薄膜材料极为重要。本文以西门子S7-300可编程控制器(PLC)为控制核心,通过触摸屏构成人机交换界面(HMI),论述了磁控溅射温度控制系统的性能特征与控制方法。以STEP 7为软件平台,扩展PLC模拟量输入模块SM331对热电阻标准模拟信号实现A/D转换;在定时中断组织模块(OB35)中循环调用温度功能块(FB58)编程实现对温度的PID闭环控制;结合FB58集成的脉宽调制输出功能,将PID运算结果转换成脉冲占空比控制固态继电器执行。PLC与HMI基于MPI协议实现通信功能,采用WinCC flexible组态友好的控制界面,完成数据输入/输出、参数修改、实时监控和报警联锁。该系统缩短了控制回路的调节时间,并减小超调量,提高了磁控溅射温度控制的自动化水平、控制精度和稳定性。
Magnetron sputtering temperature control system accuracy and operational stability of the deposition structure stability and excellent performance of thin film material is extremely important. In this paper, SIEMENS S7-300 programmable logic controller (PLC) as the control center, through the touch screen constitutes a man-machine interface (HMI), discusses the magnetron sputtering temperature control system performance characteristics and control methods. STEP 7 as a software platform to expand the PLC analog input module SM331 to the A / D conversion of the standard analog signal of the thermal resistance; cyclically call the temperature function block (FB58) in the timer interrupt organization module (OB35) to program the PID closed loop Control; combined with FB58 integrated pulse width modulation output function, the PID operation results converted to pulse duty cycle control solid state relay implementation. PLC and HMI based on the MPI protocol to achieve communication, using WinCC flexible configuration friendly control interface, complete data input / output, parameter modification, real-time monitoring and alarm interlocking. The system shortens the adjustment time of the control loop, reduces the overshoot and improves the automation level, control accuracy and stability of magnetron sputtering temperature control.