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半导体器件(特别是集成电路)的生产要求有洁净的生产环境。国内多数生产厂是由非生产性建筑改建而成,一般都没有净化措施。为了适应生产发展的急需,闯出我国净化的道路,我们几个单位在上级党组织的关怀和领导下组成了三结合的局部净化设备研制小组,经过73～75年的几年工作,研制成十种局部净化设备,配用在一○九厂六车间生产线的主要关键工序上。一九七五年三月进行的工艺考核表明,成效显著,用局部净化手段可以达到洁净的操作环境(即空气
The production of semiconductor devices (especially integrated circuits) requires a clean production environment. Most of the domestic production plants are converted from non-productive buildings and generally have no purification measures. In order to meet the urgent needs of production and development, and to clear our way of purification, several of our units have formed a three-part local purification equipment development team under the care and leadership of the higher-level party organizations. After several years of work from 73 to 75 years, we have developed Ten kinds of local purification equipment are equipped with the key processes in the production line of the No. 19 Workshop No. 6 plant. The process assessment carried out in March 1975 showed that the results were significant, and the clean operating environment (ie air